PROBLEMS OF ION-PLASMA TECHNOLOGIES ON BASIS OF VACUUM-ARC DISTHAGE AND WAY OF THEIR DECISION

Ju.A. Sysoev

In this paper considers the basic problems of ion-plasma technologies in which plasma is generated by a vacuum-arc discharge with a cold cathode. These problems are divided into groups according to the main zones which are characteristic for these technologies. The characteristics of well-known methods and equipment, which allowing us to solve some of the existing problems were generalized. The equipment is developed necessary for to produce a new generation of complex composite coatings consisting of metals, as well as several reactive gases and also for automation of processes of ion-plasma treatment.

Key words: ion-plasma technology, a vacuum-arc discharge, deposition of coatings, ion cleaning, automation of processes of ion-plasma treatment.